Micro Miniature Refrigerators

For Scanning Electron Microscopy


MMR's SEM Cold Stage is designed to mount on the sample stage of a scanning electron microscope. Samples can be studied under the electron microscope at any temperature over the operating range of the refrigerator. Flexible gas and electrical lines allow the cold stage to be moved freely with the microscope stage and oriented over a wide angular range for imaging. The same stage can be used in sputtering chambers or other high vacuum systems.


In addition to the refrigerator, a temperature controller is needed, either manual or programmable; a source of dry nitrogen (99.998% purity); and a filter dryer.



  • Operating Temperature: 80 K to 730 K
  • Temperature Stability: ± 0.1 K with K2000 Digital Controller
  • Temperature Response: 1 K/sec
  • Cooling Capacity: 250 mW at 85 K with nitrogen; 500 mW with Ar at 90 K.
  • Cold Pad Size: 14 mm x 10 mm
  • Cold Stage Dimensions: 57 mm L x 25mm W x 11mm D
  • Gas Consumption: 2.0 liters/min (STP)
  • Operating Pressure: 1800 psia
  • Weight of Cold Stage: 67 g (2.4 oz)